The Proceedings of The Computational Mechanics Conference
Online ISSN : 2424-2799
2000.13
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Three-Demensional Dislocation Density Analysis of Bulk Semiconductor Single Crystal during CZ Growth Process
Masatsugu SAKAGUCHI, Noriyuki MIYAZAKI
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Keywords: Computational Mechanics, Finite Element Method, Creep, Crystal Anisotropy, Single Crystal, Dislocation Density
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 675-676

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© 2000 The Japan Society of Mechanical Engineers
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