Analysis of Force Acting on Particles in an Electrostatic Field Using Boundary Element Method

The Proceedings of The Computational Mechanics Conference

Online ISSN : 2424-2799

2000.13

DOI https://doi.org/10.1299/jsmecmd.2000.13.97

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Analysis of Force Acting on Particles in an Electrostatic Field Using Boundary Element Method

Masataka URAGO, Masataka SUGIYAMA, Kunio TAKAHASHI, Yoshihiro MOCHIMARU

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Keywords: Micro Machine, Integrated Circuit, Coulomb Force, Electrostatic Force, Adhesion, Boundary Element Method, Analytical Integration

CONFERENCE PROCEEDINGS FREE ACCESS

Pages 97-98

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© 2000 The Japan Society of Mechanical Engineers

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