The Proceedings of The Computational Mechanics Conference
Online ISSN : 2424-2799
2004.17
Session ID : 1308
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Quantum chemical molecular dynamics analysis of the structural properties and dielectric characteristic of SiO_<2-x>films
Ken SUZUKI, Yuta ITO, Hideo MIURA, Tetsuo SHOJI
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Keywords: Molecular Dyanmics, Reliability, Band gap, SiO_2film, Strain, Oxygen vacancy
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© 2004 The Japan Society of Mechanical Engineers
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