The Proceedings of The Computational Mechanics Conference
Online ISSN : 2424-2799
2006.19
Session ID : 259
Conference information
259 Dislocation dynamics study for the nucleation and propagation of ion-implantation induced dislocations in silicon
Shoji KOBAYASHI, Masatake KIMURA, Satoshi IZUMI, Shinsuke SAKAI, Norihiko TSUCHIYA
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Keywords: Dislocation Dynamics, Micromechanics, Semiconductor, Computational Mechanics
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© 2006 The Japan Society of Mechanical Engineers
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