The Proceedings of The Computational Mechanics Conference
Online ISSN : 2424-2799
2009.22
Session ID : 1033
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1033 Material propeties of Si-DLC films by molecular simulations
Shu SAWAI, Tomohisa KUMAGAI, Junho CHOI, Takahisa KATO
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Keywords: amorphous carbon, molecular dynamics, ab-initio simulation, silicon
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© 2009 The Japan Society of Mechanical Engineers
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