The Proceedings of The Computational Mechanics Conference
Online ISSN : 2424-2799
2011.24
Session ID : 806
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806 Origin of the warpage of 3C-SiC wafer: Role of stacking fault distribution
Satoshi IZUMI, Yu SUN, Shinsuke SAKAI, Kuniaki YAGI, Hiroyuki NAGASAWA
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Keywords: Silicon Carbide, Warpage, Bilayer formula, Intrinsic stress, Stacking fault
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© 2011 The Japan Society of Mechanical Engineers
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