The Proceedings of The Computational Mechanics Conference
Online ISSN : 2424-2799
2011.24
Session ID : 403
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403 Finite element analysis of coupled structure, fluid and electrostatic field in micro cantilever-vibration and its experimental validation
Yusuke SYUKUWA, Daisuke ISHIHARA, Tomoyoshi HORIE, Tomoya NIHO
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Keywords: Finite Element Method, Coupled Analysis, MEMS, Fluid, Electrostatic Field
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© 2011 The Japan Society of Mechanical Engineers
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