The Proceedings of The Computational Mechanics Conference
Online ISSN : 2424-2799
2014.27
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Simulation of dislocation accumulation in ULSI cells and their electric characteristic evaluations
Michihiro SATO, Tetsuya OHASHI, Yosuke TAKAHASHI, Takuya MARUIZUMI, Kenta SHIMADA, Yuta Kasuya
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Keywords: ULSI, Shallow trench isolation, dislocation, crystal plasticity analysis
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Pages 7-8

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© 2014 The Japan Society of Mechanical Engineers
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