2017.30
Session ID : 100
Conference information
Host: The Japan Society of Mechanical Engineers
Name : [in Japanese]
Date : September 16, 2017 - September 18, 2017
AoG (Age of Gas) simulations for gas flow evaluation in chambers of thin film deposition devices
Keywords:
Cleanroom,
Contamination Control,
Age of Air,
Sedimentation Velocity,
Langmuir-type Adsorption Model
Details
