The Proceedings of Conference of Chugoku-Shikoku Branch
Online ISSN : 2424-2764
005.1
Session ID : 209
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209 Evaluation of Fracture Strength and Interfacial Strength of Sputtered TiN Film on Titanium Specimen
Xu YAN, Masahiko KATO, Keijiro NAKASA
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Keywords: Interfacial fracture toughness, Fracture strength, Sputter TiN film,, Division, Delamination
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© 2000 The Japan Society of Mechanical Engineers
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