The Proceedings of Conference of Chugoku-Shikoku Branch
Online ISSN : 2424-2764
2002.40
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Fundamental Research on Fabrication of SiC/Si Structure by diffusing Carbon into Single Crystal Silicon
Shinji Kage, [in Japanese]
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CONFERENCE PROCEEDINGS FREE ACCESS

Pages 429-430

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© 2002 The Japan Society of Mechanical Engineers
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