The Proceedings of Conference of Chugoku-Shikoku Branch
Online ISSN : 2424-2764
2004.42
Session ID : 1112
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Evaluation of the Performance of E-maccel : _!Electrostatic _!Micro _!Actuator with Distributed _!Ciliary _!Electrodes
Yusuke Iwasaki, Kazuyuki Minami
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© 2004 The Japan Society of Mechanical Engineers
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