The Proceedings of Conference of Chugoku-Shikoku Branch
Online ISSN : 2424-2764
2006.44
Session ID : 201
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201 Synthesis of a SiC Thin Film with in-Liquid Plasma CVD
Kenji SHIBATA, Nagatoshi OKABE, Shinfuku NOMURA, Hiromiti TOYOTA
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Keywords: Liquid Plasma, SiC coating
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© 2006 The Japan Society of Mechanical Engineers
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