The Proceedings of Conference of Chugoku-Shikoku Branch
Online ISSN : 2424-2764
2008.46
Session ID : 1303
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1303 Design of the Non-linear Springs of Microactuator powered by Collaboration of Electrostatic and Elastic energies/forces
Yasuhiro MITA, Kazuyuki MINAMI, Katsuya SATO
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Keywords: Electrostatic Energy, Microactuator, Non-linear Spring, MEMS
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© 2008 The Japan Society of Mechanical Engineers
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