The Proceedings of Conference of Chugoku-Shikoku Branch
Online ISSN : 2424-2764
2010.48
Session ID : 311
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311 Evaluation of Piezo-resistivity of Transparent Conductive Thin Film Deposited by Sputtering
Koji SUMIMOTO, Masahiko KATO, Hiroyuki AKEBONO, Atsushi SUGETA
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Keywords: ZnO, Thin Film, Piezoelectric, Sputtering
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© 2010 The Japan Society of Mechanical Engineers
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