The Proceedings of Conference of Chugoku-Shikoku Branch
Online ISSN : 2424-2764
2012.50
Conference information
1316 Study about synthesis of DLC thin film using plasma CVD method
Takashi MORIKAWA, Shinobu MUKASA, Hiromichi TOYOTA, Shinnfuku NOMURA
Author information
Keywords: RF Plasma, DLC, Spectroscopy
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 131601-131602

Details
Download PDF (248K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Article 1st page
Content from these authors
© 2012 The Japan Society of Mechanical Engineers
Previous article Next article
Favorites & Alerts

Recently viewed articles
Announcements from publisher
Share this page
feedback
 Top