The Proceedings of Conference of Chugoku-Shikoku Branch
Online ISSN : 2424-2764
2012.50
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301 High-speed formation of compound semiconductors using in-liquid plasma chemical vapor deposition
Hiromichi Toyota, Tatsuya Baba, Shinfuku Nomura, Shinobu Mukasa
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Keywords: SiC, in-liquid plasma, DC power
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 30101-30102

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© 2012 The Japan Society of Mechanical Engineers
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