The Proceedings of Conference of Chugoku-Shikoku Branch
Online ISSN : 2424-2764
2015.53
Session ID : 210
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210 Evaluation of Vacuum Friction Coefficient of SiC Film with Projection Formed by Nanowires
Kenta KAWASAKI, Hiroyuki AKEBONO, Masahiko KATO, Atsushi SUGETA
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Keywords: Nano-wires, SiC Film, Sputtering, Friction Test, Vacuum
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© 2015 The Japan Society of Mechanical Engineers
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