The Proceedings of Conference of Chugoku-Shikoku Branch
Online ISSN : 2424-2764
2018.56
Session ID : 306
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Host: The Japan Society of Mechanical Engineers

Name : [in Japanese]

Date : March 07, 2018 -

Development of a micro-heater using photosensitive composite
*Junichi TASAKI, Tasuku NAKAHARA, Kazuyuki MINAMI
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Keywords: photosensitive composite, micro-heater, MEMS, photolithography
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