2022.60
Session ID : 04b3
Conference information
Host: The Japan Society of Mechanical Engineers
Name : [in Japanese]
Date : March 04, 2022
Effects of surface force in dynamic measurements of optical lever AFM
(Analyses considering squeeze force of air film)
Keywords:
Atomic Force Microscope (AFM),
Cantilever,
Forced Vibration,
Optical Lever Method,
Surface Force
Details
Article 1st page
