243 Comprehensive Active Microvibration Control in Base-Isolated Semiconductor Factories : Smart Structure for Microvibration Generated in Building - Part 2

Abstract

Comprehensive active microvibration control system will be required in base-isolated precision manufacturing facilities, in order to control both microvibrations generated by equipment and persons in the buildings and excited by external disturbances such as ambient ground vibrations and winds. A smart structure using piezoelectric actuators was tested for the overall active microvibration control in a base-isolated 2-story steel frame building model of a 5×3×4H m external size and a 6,900 kg total mass which was supported by 4 multistage rubber bearings. The tests showed that the smart structure could effectively control three-dimensional microvibrations generated in the building model.