Abstract
This paper presents a new modeling and vibration controlling methods for an active isolation system with an elastic table and multi modes of vibration. Then the light-weighted isolation table becomes more flexible, causing the appearance of elastic multiple modes. Therefore, a control system should be designed which takes into account multiple modes. In this paper, the reduced order physical model proposed by Seto is used for designing controller an active isolation system with an elastic table and multi modes of vibration. For controlled system design, LQ control theory and double-active control method with feed-forward control are applied. The effectiveness of the method is demonstrated through simulation and experiment.
