Abstract
This paper deals with the non-contact transportation of target specimen using the ultrasonic wave. It is the purpose of this paper to examine a possibility of rotation and position control using traveling wave control technique, and to anayize squeeze film due to the traveling wave. Firstly from the view point of a numerical analysis, the principle of transportation is presented by the pressure distribution of a squeeze film. Next, experiment of the transportation and the positioning control using the method of traveling wave of the beam controlling the phase are carried out. Finally, experiment of rotation control of levitated object in the transportation using the same method of the above proposal are accomplished, and the accuracy of these method is investigated.
