Abstract
In this paper, coupled vibration between the isolation table and the load is modeled. First, we prepared the FEM model of the isolation table with load. If to control a structural vibration is a purpose,it needs to reduce FEM model order. We use the extended reduced-order physical model (extended model) to reduce order from this FEM model. The extended model is developed for the control of the motion and vibration. This paper reported that the extended model has expressed well the correct natural frequencies and correct frequency responses by composing.
