Abstract
In this paper, an evaluation of transducer for a micro ultrasonic motor is introduced. The motor is a traveling wave type ultrasonic motor driven by the cylindrical shaped bulk piezoelectric vibrator, a diameter of 0.8 mm and 2.2 mm. The dimensions of the motor were 1.8 mm of diameter and 5.8 mm of height. We have fabricated the transducer, the vibrator for the driving of motor, and evaluated its characteristics.
