Abstract
The authors are developing an UHV compatible motor utilizing mode rotation type ultrasonic motor. To avoid failure of the motor caused by breakage of its piezoelectric ceramic, the transducer is split at the positions where breakage often occurs. This improved the transducer lifetime by a factor of 25 without unbalancing characteristics of bending vibrations excited on the stator. To improve balance between these characteristics more, the transducer was trimmed. Unfortunately, expected result was not obtained, but this showed that required accuracy of splitting the transducer is not very high.
