Abstract
A highly precise actuator which applied to a track following for a high density magnetic recording evaluation system was designed and developed. The actuator called the Nano-motion actuator (NMA) that was consisted of a displacement amplitude mechanism, which was composed of a parallel spring and a lever mechanism, and a layered piezoelectric element (PZT). A original NMA has a working distance of 12.6μm, the gain crossover frequency of 3.07kHz with the excessive load of 15g. In this paper, the XY-type NMA that consisted of the original NMA and a new translation type of NMA was designed. Moreover, we verified the positioning accuracy of the XY-type NMA in a X-Y plane and step responses for each axis. As the gain crossover frequency could reach to 1.0kHz for X and Y axis, respectively, the XY type NMA could realize high speed and highly precise positioning in the X-Y plane.
