The Proceedings of the Dynamics & Design Conference
Online ISSN : 2424-2993
2007
Session ID : 107
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107 Actively Controlled Seismic Isolation Floor for Ultraprecise Manufacturing Facilities
Akira FUKUKITATomoo SAITOYukinobu KONOTetsuya KUBOTA
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CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract
It is important to protect manufacturing or inspection devices from disaster by eartyquake in terms of business continuity plan. One of the most effective techniques is seismic isolation floor. We made a prototype setup of actively controlled seismic isolation floor which consists of servo motor and ball screw and it can be installed additional stiffness to imitate actual pipes or cables connected to the devices. We examined about the performance of the isolation floor on the shaking table and this isolation floor performed smoothly by canceling the resisting force. The resoponse of both acceleration and displacement of the isolation floor can be reduced by active control method of skyhook control and optimal control.
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© 2007 The Japan Society of Mechanical Engineers
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