Abstract
This paper deals with development of tuned mass damper for vibration isolation table. If the honeycomb vibration isolation table has the experimental equipment including the vibration resource and the vibration frequency of the resource is identical with the natural frequency of the isolation table, resonance will be occurred between the resource and the table, and it makes large influence on the measurement accuracy. This study has been carried out in order to realize an optimum design to satisfy the requirements for vibration isolation table with high performance. Based on the finite element model by NASTRAN, the simulation were executed to estimate the influence to the natural frequencies and the compliance of the vibration isolation table by changing mass or damping of TMD.