Abstract
In this paper, the double layered or triple layered piezoelectric pump is rationally designed for the purpose of more pump performance improvement. In the experiment, discharge rate characteristics of piezoelectric pump are investigated. In order to attempt the theoretical prediction of discharge rate, the deflection curve of PZT vibrator is examined. Experimental results show that the maximum discharge rates were increased than the single layer pump. And, in the case of driving in low frequency, the vibration displacement of PZT vibrator was approximated as the deflection curve, which calculated simplified theoretical model.