Abstract
This paper presents a structural and controller design approach for the fast and precise positioning. In order to achieve the high performance in positioning, it is important to compensate for effects of mechanical vibration modes at around the control bandwidth on the performance, where the vibration suppression by the controller design should be promising, as well as the optimization of mechanism. In this research, therefore, the primary vibration mode is canceled by the structural design considering a vibration node, where a design guideline is clarified by a modal analysis-based mode shape. The proposed approach has been verified by experiments using a prototype.
