Abstract
Force redistribution method for compensating actuator-breakdown of vibration isolation tables is studied in this paper. Force of actuators can be adjusted by stepping motors in the regulator when some actuators are breaking down. The vibration isolation table in this study is supported by 8 pneumatic actuators, and has redundant number of actuators against degrees of freedom of motion. We propose a redistributing method of force which utilizes redundancy of the actuators. Effectiveness of the proposed method is examined by simulation.
