2311 Parametric Study of Spin Coating Technique to Prepare Catalyst Nanoparticles

Abstract

The formation of nanosized catalyst particles from Fe- and Co-based functional solution is very important for carbon nanotube growth. The most critical factor is the uniformity of catalyst thin film thickness, because roughened surface may directly affect the size of the particles. In order to achieve good uniformity, there are few spin coating parameter need to be controlled during the spin coating process; e.g., volumes of solution, rotation speeds, and spin time. Appropriate temperature during heat treatment is another critical factor for the nanoparticle formation due to its ability to develop nanoparticle dimension consistent to that of original thickness.