The Proceedings of the Symposium on Environmental Engineering
Online ISSN : 2424-2969
2005.15
Session ID : 417
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417 Performance of Humidifying in Clean Room by Water Atomization Humidifying : Influence of Humidifying Nozzle Position on Humidity Distribution in Clean Room
Satoshi UEMURAKazuaki IIJIMAHirotaka SUZUKI
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Abstract
Direct humidification using compressed air atomizer is one of the conventional methods at printing factory. Atomized water removes heat from air when it evaporates so it contributes to both heating and cooling cost. We have improved the control system that can keep the humidity constant using dual control valves. When the humidification system is being applied to existing factory, the examination of setting-up interval of atomizers is needed to uniformity the humidity in clean room. In this study, we tried to estimate the distribution of humidity using simulation of CFD.
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© 2005 The Japan Society of Mechanical Engineers
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