A steam plasma flow generated by a dielectric barrier discharge (DBD) at atmospheric pressure was developed to understand the generation mechanism of OH radical and its sterilization efficacy. It was clarified that the OH radical is the important factor for sterilization since the steam plasma had a sterilization effect at the discharge region, although H_2O_2 in condensed water did not have sterilization effect. The OH radical was generated from the wire electrode toward the ground electrode and the concentration of H_2O_2 increased after streamer propagation.