The Proceedings of the Fluids engineering conference
Online ISSN : 2424-2896
2000
Conference information
Development of semi-conductor device cleaning by cavitation jet
Manabu Tsujimura, Katsuhiko Shirakashi, Satomi Hamada, Hirokuni Hiyama, Soichi Nadahara, Hiroshi Tomita, Masahiro Ota
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Keywords: Cavitation jet, Semi-conductor device cleaning, Non-contact type cleaning
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Pages 115-

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© 2000 The Japan Society of Mechanical Engineers
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