The Proceedings of the Fluids engineering conference
Online ISSN : 2424-2896
2001
Session ID : 109
Conference information
109 Production of radicals in inductively-coupled CF_4 plasmas
Kenichi NANBU, Eigo TAKAHASHI
Author information
Keywords: Inductively-coupled plasma, Electromagnetic field, Finite difference method
CONFERENCE PROCEEDINGS FREE ACCESS

Details
Download PDF (172K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Article 1st page
Content from these authors
© 2001 The Japan Society of Mechanical Engineers
Previous article Next article
Favorites & Alerts

Recently viewed articles
Announcements from publisher
Share this page
feedback
 Top