The Proceedings of the Fluids engineering conference
Online ISSN : 2424-2896
2001
Session ID : 111
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111 Velocity Distribution of Ions Incident on a Wafer in Two-Frequency Capacitively-Coupled Plasma
Go WAKAYAMA, Kenichi NANBU
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Keywords: plasma, PIC, MC, 2f-CCP, IED, sheath model
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© 2001 The Japan Society of Mechanical Engineers
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