The Proceedings of the Fluids engineering conference
Online ISSN : 2424-2896
2004
Session ID : 113
Conference information
A Study on Ekman Spirais in a Rotating Disk in Spin Coating System : Influences of the Exhaust Flows in Ekman Spirals
Seiichi KIMURA, Kazuyoshi MATSUZAKI, Mizue MUNEKATA, Hiroaki KURISHIMA, Hideki OHBA
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Keywords: Ekman spiral vortices, Spin Coating, Flow visualization, Hot-wire measurement, Exhaust flow
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© 2004 The Japan Society of Mechanical Engineers
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