Abstract
The ultra-high heat flux characteristics and rapid cooling effect of the micro-solid nitrogen (SN_2) spray flow through a two-fluid nozzle to the heated plate was numerically investigated and measured by a new type of integrated simulation technique. Furthermore, PIA mesurement has been applied to clarify the solid-particle diameter profiles of the micro-solid spray, and the wafer resist removal characteristics by thermo-mechanical effect was investigated. Based on the integrated numerical and experimental study, a new type of ultra-high heat flux cryogenic cooling system and the thermomechanical resist removal-cleaning system using cryogenic micro-solid spray was developed.
