G712 Characteristics of Electron density and Electron temperature in Argon Surface Wave Plasma

Abstract

In this study, the flow characteristics by surface wave plasma (SWP) are investigated using argon and oxygen as working gases. The relationship between wetting characteristics and electron excitation temperature is examined. With increasing argon ratio, the variation of contact angles each position becomes large. This is because the sputtering effect of argon atoms is more influenced by flow than the oxidation reaction of oxygen atom