Abstract
We devised newly the manufacturing process of a semiconductor-type sensor for the pressure measurement within the range of several Pa and with the frequency response of the order of 100Hz using MEMS (Micro Electro Mechanical Systems) technology and examined the static and the dynamic characteristics of the sensor. The results obtained were good linearity and high response of the sensor. Moreover, measurement was made of a pressure on the flat-plate wing at the order of 104 of chord Reynolds numbers. As a result, it was found that the sensor respond to the separation phenomena of wing well.
