The Proceedings of Conference of Hokuriku-Shinetsu Branch
Online ISSN : 2424-2772
2007.44
Session ID : 614
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614 Development of Stand Alone Nano Machining and Measuring System for Nano Factory
Kiyonori INAGAKI, Noboru MORITA, Noboru TAKANO, Jyunji SAITOU, Mineo MIZUMURA, Kazutaka KANDA, Kiwamu ASHIDA, Tsutomu OBATA, Yoshinori FUNADA
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Keywords: Diamond AFM Cantilever, Diamond Array Tool, Precision Machining, Nano Machining
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© 2007 The Japan Society of Mechanical Engineers
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