The Proceedings of Conference of Hokuriku-Shinetsu Branch
Online ISSN : 2424-2772
2009.46
Session ID : 313
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313 Research on Fabrication of three dimensional microstructure by Ion Beam Irradiation
Takenori MURATA, Noboru MORITA, Shigeru YAMADA, Noboru TAKANO, Tatsuo OYAMA
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Keywords: FIB, AFM, Single Crystal Silicon, microstructure, Sputtering
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© 2009 The Japan Society of Mechanical Engineers
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