1121 FIBを用いた3次元微細構造形成に関する研究(第2報) : シリコン及びグラッシーカーボンのFIB加工特性(OS7-4 機械加工の高速・高精度化(切削・研削・特殊加工および周辺技術)4,オーガナイズドセッション:7)

村田 剛基; 森田 昇; 山田 茂; 高野 登; 大山 達雄

doi:10.1299/jsmehs.2010.47.429

The Proceedings of Conference of Hokuriku-Shinetsu Branch

Online ISSN : 2424-2772

2010.47

Session ID : 1121

DOI https://doi.org/10.1299/jsmehs.2010.47.429

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1121 Research on Fabrication of three dimensional microstructure by Ion Beam Irradiation(2nd Report) : Focused Ion Beam Machining Properties on Silicon and Glassy Carbon

Takenori MURATA, Noboru MORITA, Shigeru YAMADA, Noboru TAKANO, Tatsuo OYAMA

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Keywords: FIB, Sputtering, Single Crystal Silicon, Glassy Carbon, microstructure

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