The Proceedings of Conference of Hokuriku-Shinetsu Branch
Online ISSN : 2424-2772
2010.47
Session ID : 305
Conference information
305 Proposal of New Supplying Evaporation Precursor Method with CVD by using Mixed Solution : Relation between HfO_2 Film Surface Condition and Injection Quantity
Motohiro OSHIMA, Koji TOMINAGA, Jiro SENDA, Kozo ISHIDA
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Keywords: Flash boiling, Spray, CVD, Two phase region, chemical vapor deposition, HfO_2 film
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© 2010 The Japan Society of Mechanical Engineers
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