The Proceedings of Conference of Hokuriku-Shinetsu Branch
Online ISSN : 2424-2772
2013.50
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1204 Experimental study on photoresist removal using water jet (Effects of jet impingement angle and water quality)
Yasuhiro SUGIMOTO, Keiichi SATO, Hideo HORIBE
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Keywords: Water jet, Photoresist removal, Water quality, Pure water
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Pages 120401-120402

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© 2013 The Japan Society of Mechanical Engineers
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