2017.54
Session ID : E022
Conference information
Host: The Japan Society of Mechanical Engineers
Name : [in Japanese]
Date : March 09, 2017 -
Composite Material of Gas Permeable Mold for Nanoimprint Microfabrication
Keywords:
Nanoimprint lithography,
Composite material,
Hydroxy propyl cellulose,
Porous mold,
Mechanical property
Details
Article 1st page
