Abstract
A micro-flowmeter has been developed for high-speed and high-precision microfluidic device operations. Flow rate measurements on the blood flow in capillary vessel at fingertips were demonstrated using the prototype laser micro flowmeter. We fabricated the microfluidic devices with surface acoustic wave (SAW), and the microchannels using the ultrashort pulse laser machining system. The performance of controllability of the microfluidic device using SAW was investigated using the flowmeter.
