Abstract
A lot of highly precise surfaces are needed at the semiconductor and the medical field. For removing the machining traces of plane surfaces, magnetic abrasive finishing (MAF) is an effective method in which magnetic abrasive and magnetic field are used. In this research, to achieve super-precise surface, the influence exerted on the shape of magnetic pole was considered. In the study, three types magnetic poles were made and their magnetic flux densities were investigated by electromagnetic simulation. At last, a new finishing program has been proposed that can finish plane surface into nanometer-scale. The surface roughness has been improved from 381.32 nm Ra into 12.02 nm Ra.
